Regardless of your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process needs within the global electronics industry.
You can rely on Linde's experts to deliver low-cost, reliable solutions for:
-
Nitrogen generation
-
Hydrogen generation
-
Fluorine generation
-
Ammonia purification.
| Gas | Output Range | Purity |
| Nitrogen | 6,000 - 36,000 Nm3 per hour | 1 ppb |
| Hydrogen | 50 - 1,000 Nm3 per hour | 99.999% |
| Fluorine | 80 - 1600 liters per hour | 99.9% |
| Ammonia | 1,000 - 5,000 liters per minute | 99.99999% |
Low Running Costs
Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. Here we look at all cost factors including capital outlay, power consumption and running costs.
Reliability
In addition, our on-site gas generators give you the benefit of uninterrupted operations. They are designed for continuous delivery, seven days a week, 24 hours a day.
Market segments